Author: Michael Quirk
Edition: 1
Binding: Paperback
ISBN: 0130815209
Edition: 1
Binding: Paperback
ISBN: 0130815209
Semiconductor Manufacturing Technology
In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. Download Semiconductor Manufacturing Technology from rapidshare, mediafire, 4shared. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting.
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